Yoshio Kawanobe

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Utsunomiya-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Focus measurement in projection exposure apparatus
- Patent number 6,633,390
- Issue date Oct 14, 2003
- Canon Kabushiki Kaisha
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20090075210
- Publication date Mar 19, 2009
- Canon Kabushiki Kaisha
- Atsushi Takagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20080198345
- Publication date Aug 21, 2008
- Canon Kabushiki Kaisha
- Youji Kawasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
- Publication number 20080198347
- Publication date Aug 21, 2008
- Canon Kabushiki Kaisha
- Youji Kawasaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Focus measurement in projection exposure apparatus
- Publication number 20020015158
- Publication date Feb 7, 2002
- Yoshihiro Shiode
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY