Yoshio Kumagai

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Patents Grantslast 30 patents

Information Patent Grant
Substrate rinsing and drying method
- Patent number 6,620,260
- Issue date Sep 16, 2003
- Tokyo Electron Limited
- Yoshio Kumagai
- B08 - CLEANING
Information Patent Grant
Substrate washing method, substrate washing-drying method, substrat...
- Patent number 6,001,191
- Issue date Dec 14, 1999
- Tokyo Electron Limited
- Yuuji Kamikawa
- B08 - CLEANING
Information Patent Grant
Spin dryer and substrate drying method
- Patent number 5,873,177
- Issue date Feb 23, 1999
- Tokyo Electron Limited
- Yoshiyuki Honda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate washing and drying apparatus, substrate washing method, a...
- Patent number 5,845,660
- Issue date Dec 8, 1998
- Tokyo Electron Limited
- Naoki Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device
- Patent number 5,236,515
- Issue date Aug 17, 1993
- Tokyo Electron Limited
- Kinya Ueno
- B08 - CLEANING
Information Patent Grant
Cleaning device
- Patent number 5,188,136
- Issue date Feb 23, 1993
- Tokyo Electron Limited
- Yoshio Kumagai
- B08 - CLEANING
Information Patent Grant
Film forming method and film forming device
- Patent number 5,015,330
- Issue date May 14, 1991
- Kabushiki Kaisha Toshiba
- Katsuya Okumura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Substrate processing method and substrate processing apparatus
- Publication number 20020037371
- Publication date Mar 28, 2002
- Yoshio Kumagai
- H01 - BASIC ELECTRIC ELEMENTS