Yoshio Matsumura

Person

Shiga, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus for and method of processing substrate
- Patent number 5,919,529
- Issue date Jul 6, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Matsumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and method for substrate from the subst...
- Patent number 5,823,736
- Issue date Oct 20, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Matsumura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Apparatus for removing liquid from substrates
- Patent number 5,762,749
- Issue date Jun 9, 1998
- Dainippon Screen Mfg. Co., Ltd.
- Satoshi Suzuki
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 5,701,627
- Issue date Dec 30, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Matsumura
- B08 - CLEANING
Information Patent Grant
Subtrate processing apparatus and device for and method of exchangi...
- Patent number 5,571,325
- Issue date Nov 5, 1996
- Dainippon Screen Mfg. Co., Ltd.
- Tsutomu Ueyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate heat-treating apparatus
- Patent number 5,201,653
- Issue date Apr 13, 1993
- Dainippon Screen Mfg. Co., Ltd.
- Moriyoshi Hasegawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for heat treatment of a substrate
- Patent number 4,919,614
- Issue date Apr 24, 1990
- Dainippon Screen Mfg. Co., Ltd.
- Kunio Kitagawa
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus and a method for carrying wafers
- Patent number 4,856,641
- Issue date Aug 15, 1989
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Matsumura
- H01 - BASIC ELECTRIC ELEMENTS

Yoshio Matsumura

Person

Patents Grantslast 30 patents

Apparatus for and method of processing substrate

Substrate processing device and method for substrate from the subst...

Apparatus for removing liquid from substrates

Substrate processing apparatus

Subtrate processing apparatus and device for and method of exchangi...

Substrate heat-treating apparatus

Apparatus for heat treatment of a substrate

Apparatus and a method for carrying wafers