Yoshio Morishige

Person

Honjyou, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,559,000
- Issue date Oct 15, 2013
- Hitachi High-Technologies Corporation
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
- Patent number 8,422,009
- Issue date Apr 16, 2013
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,274,651
- Issue date Sep 25, 2012
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 8,040,503
- Issue date Oct 18, 2011
- Hitachi, Ltd.
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
- Patent number 7,986,405
- Issue date Jul 26, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Grant
Method of detecting defects on an object
- Patent number 7,940,383
- Issue date May 10, 2011
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Foreign matter inspection method and foreign matter inspection appa...
- Patent number 7,719,671
- Issue date May 18, 2010
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,692,779
- Issue date Apr 6, 2010
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 7,643,138
- Issue date Jan 5, 2010
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,639,350
- Issue date Dec 29, 2009
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,443,496
- Issue date Oct 28, 2008
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 7,417,723
- Issue date Aug 26, 2008
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,098,055
- Issue date Aug 29, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 7,061,602
- Issue date Jun 13, 2006
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus and method for testing defects
- Patent number 7,037,735
- Issue date May 2, 2006
- Hitachi, Ltd.
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Grant
Method of inspecting a semiconductor device and an apparatus thereof
- Patent number 6,888,959
- Issue date May 3, 2005
- Hitachi, Ltd.
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Optical apparatus for defect and particle size inspection
- Patent number 6,411,377
- Issue date Jun 25, 2002
- Hitachi, Ltd.
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Surface defect inspection device and shading correction method ther...
- Patent number 5,880,828
- Issue date Mar 9, 1999
- Hitachi Electronics Engineering Co., Ltd.
- Hisato Nakamura
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection apparatus for patterned wafer
- Patent number 5,818,576
- Issue date Oct 6, 1998
- Hitachi Electronics Engineering Co., Ltd.
- Yoshio Morishige
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection apparatus for patterned wafer
- Patent number 5,724,132
- Issue date Mar 3, 1998
- Hitachi Electronics Engineering Co., Ltd.
- Yoshio Morishige
- G01 - MEASURING TESTING
Information Patent Grant
Surface inspection method and apparatus
- Patent number 5,694,214
- Issue date Dec 2, 1997
- Hitachi Electronics Engineering Co., Ltd.
- Tetsuya Watanabe
- G01 - MEASURING TESTING
Information Patent Grant
Extraneous substance inspection method and apparatus
- Patent number 5,644,393
- Issue date Jul 1, 1997
- Hitachi Electronics Engineering Co., Ltd.
- Hisato Nakamura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120312104
- Publication date Dec 13, 2012
- Akira Hamamatsu
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20120006131
- Publication date Jan 12, 2012
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...
- Publication number 20110267605
- Publication date Nov 3, 2011
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Application
FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...
- Publication number 20100195095
- Publication date Aug 5, 2010
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20100140474
- Publication date Jun 10, 2010
- Akira HAMAMATSU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus And Method For Testing Defects
- Publication number 20100088042
- Publication date Apr 8, 2010
- Minori NOGUCHI
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF
- Publication number 20080291437
- Publication date Nov 27, 2008
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Foreign matter inspection method and foreign matter inspection appa...
- Publication number 20070201019
- Publication date Aug 30, 2007
- Hitachi High-Technologies Corporation
- Hiroyuki Yamashita
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146696
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR TESTING DEFECTS
- Publication number 20070146697
- Publication date Jun 28, 2007
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting a semiconductor device and an apparatus thereof
- Publication number 20060215153
- Publication date Sep 28, 2006
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030060
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20060030059
- Publication date Feb 9, 2006
- Minori Noguchi
- G01 - MEASURING TESTING
Information Patent Application
Method of inspecting a semiconductor device and an apparatus thereof
- Publication number 20050196033
- Publication date Sep 8, 2005
- Akira Hamamatsu
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Apparatus and method for testing defects
- Publication number 20020168787
- Publication date Nov 14, 2002
- Minori Noguchi
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of inspecting a semiconductor device and an apparatus thereof
- Publication number 20010048761
- Publication date Dec 6, 2001
- Akira Hamamatsu
- G01 - MEASURING TESTING

Yoshio Morishige

Person

Patents Grantslast 30 patents

Method of inspecting a semiconductor device and an apparatus thereof

Foreign matter inspection method and foreign matter inspection appa...

Method of inspecting a semiconductor device and an apparatus thereof

Method of inspecting a semiconductor device and an apparatus thereof

Foreign matter inspection method and foreign matter inspection appa...

Method of detecting defects on an object

Foreign matter inspection method and foreign matter inspection appa...

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Apparatus and method for testing defects

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Optical apparatus for defect and particle size inspection

Surface defect inspection device and shading correction method ther...

Extraneous substance inspection apparatus for patterned wafer

Extraneous substance inspection apparatus for patterned wafer

Surface inspection method and apparatus

Extraneous substance inspection method and apparatus

Patents Applicationslast 30 patents

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...

FOREIGN MATTER INSPECTION METHOD AND FOREIGN MATTER INSPECTION APPA...

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

Apparatus And Method For Testing Defects

METHOD OF INSPECTING A SEMICONDUCTOR DEVICE AND AN APPARATUS THEREOF

Foreign matter inspection method and foreign matter inspection appa...

APPARATUS AND METHOD FOR TESTING DEFECTS

APPARATUS AND METHOD FOR TESTING DEFECTS

Method of inspecting a semiconductor device and an apparatus thereof

Apparatus and method for testing defects

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof

Apparatus and method for testing defects

Method of inspecting a semiconductor device and an apparatus thereof