Yoshio Okamoto

Follow

Person

Kyoto, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Resist stripping method and resist stripping apparatus
- Patent number 7,682,463
- Issue date Mar 23, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Okuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 7,591,922
- Issue date Sep 22, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 6,878,303
- Issue date Apr 12, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Okamoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Resist stripping method and resist stripping apparatus
- Publication number 20050205115
- Publication date Sep 22, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Atsushi Okuyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20050178503
- Publication date Aug 18, 2005
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Okamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing apparatus and substrate processing method
- Publication number 20030132193
- Publication date Jul 17, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Yoshio Okamoto
- H01 - BASIC ELECTRIC ELEMENTS