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Yoshio Ota
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Ibaraki-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Particle removing member of substrate processing equipment
Patent number
8,230,542
Issue date
Jul 31, 2012
Nitto Denko Corporation
Koichi Hashimoto
B08 - CLEANING
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Patent Grant
Particle removing member of substrate processing equipment
Patent number
8,108,960
Issue date
Feb 7, 2012
Nitto Denko Corporation
Koichi Hashimoto
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
PARTICLE REMOVING MEMBER OF SUBSTRATE PROCESSING EQUIPMENT
Publication number
20120131757
Publication date
May 31, 2012
Nitto Denko Corporation
Koichi Hashimoto
B08 - CLEANING
Information
Patent Application
Particle removing member of substrate processing equipment
Publication number
20050186428
Publication date
Aug 25, 2005
NITTO DENKO CORPORATION
Koichi Hashimoto
B08 - CLEANING