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Yoshio Seqi
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Shizuoka, JP
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last 30 patents
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Patent Grant
Method of cleaning a film deposition apparatus, method of dry etchi...
Patent number
6,453,913
Issue date
Sep 24, 2002
Canon Kabushiki Kaisha
Hiroyuki Katagiri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
Method of cleaning a film deposition apparatus, method of dry etchi...
Publication number
20010054430
Publication date
Dec 27, 2001
Hiroyuki Katagiri
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...