Yoshio SUSA

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 9,659,754
- Issue date May 23, 2017
- Tokyo Electron Limited
- Jun Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20140124478
- Publication date May 8, 2014
- TOKYO ELECTRON LIMITED
- Jun YOSHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS