Yoshio SUSA

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method of forming high aspect ratio features
- Patent number 12,125,700
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming a laminate film by cyclical plasma-enhanced dep...
- Patent number 12,040,177
- Issue date Jul 16, 2024
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structures including multiple carbon layers and methods of forming...
- Patent number 11,705,333
- Issue date Jul 18, 2023
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
- Patent number 11,646,197
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing carbon-containing material on a surface of a s...
- Patent number 11,626,316
- Issue date Apr 11, 2023
- ASM IP Holding B.V.
- Mitsuya Utsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor array, apparatus for dispensing a vapor phase reactant to a...
- Patent number 11,430,674
- Issue date Aug 30, 2022
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,348,766
- Issue date May 31, 2022
- ASM IP Holding B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for dispensing a vapor phase reactant to a reaction chamb...
- Patent number 10,844,484
- Issue date Nov 24, 2020
- ASM IP Holding B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing silicon-free carbon-containing film as gap-fi...
- Patent number 10,755,922
- Issue date Aug 25, 2020
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and patterning method
- Patent number 10,707,073
- Issue date Jul 7, 2020
- ASM IP Holding B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method for processing substrate
- Patent number 10,629,415
- Issue date Apr 21, 2020
- ASM IP Holding B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming vertical spacers for spacer-defined patterning
- Patent number 10,290,508
- Issue date May 14, 2019
- ASM IP Holding B.V.
- Tomohiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF FORMING DIELECTRIC MATERIAL LAYER USING PLASMA
- Publication number 20240304441
- Publication date Sep 12, 2024
- ASM IP HOLDING B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING DIELECTRIC MATERIAL LAYER USING PLASMA
- Publication number 20240271280
- Publication date Aug 15, 2024
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING LAYER ON DIFFERENT-DENSITY PATTERN REGIONS
- Publication number 20240043990
- Publication date Feb 8, 2024
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS
- Publication number 20240011151
- Publication date Jan 11, 2024
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A...
- Publication number 20230137026
- Publication date May 4, 2023
- ASM IP HOLDING B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEVEL ETCHER USING ATMOSPHERIC PLASMA
- Publication number 20230129291
- Publication date Apr 27, 2023
- ASM IP HOLDING B.V.
- Yoshio Susa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING A SILICON CARBIDE LAYER
- Publication number 20230043629
- Publication date Feb 9, 2023
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...
- Publication number 20220406625
- Publication date Dec 22, 2022
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FILLING GAP WITH FLOWABLE CARBON LAYER
- Publication number 20220336204
- Publication date Oct 20, 2022
- ASM IP HOLDING B.V.
- Ryo Miyama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FILLING RECESSES ON SUBSTRATE SURFACE, STRUCTURES FORMED...
- Publication number 20220251707
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING SILICON-CARBON MATERIAL, ST...
- Publication number 20220178023
- Publication date Jun 9, 2022
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR FORMING A LAMINATE FILM BY CYCLICAL PLASMA-ENHANCED DEP...
- Publication number 20220059340
- Publication date Feb 24, 2022
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRUCTURES INCLUDING MULTIPLE CARBON LAYERS AND METHODS OF FORMING...
- Publication number 20210366712
- Publication date Nov 25, 2021
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A STRUCTURE INCLUDING CARBON MATERIAL, STRUCTURE...
- Publication number 20210238742
- Publication date Aug 5, 2021
- ASM IP HOLDING B.V.
- Yoshio Susa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING HIGH ASPECT RATIO FEATURES
- Publication number 20210225642
- Publication date Jul 22, 2021
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF DEPOSITING CARBON-CONTAINING MATERIAL ON A SURFACE OF A S...
- Publication number 20210151348
- Publication date May 20, 2021
- ASM IP HOLDING B.V.
- Mitsuya Utsuno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...
- Publication number 20200365391
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20200211827
- Publication date Jul 2, 2020
- ASM IP HOLDING B.V.
- Yoshio SUSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...
- Publication number 20200066552
- Publication date Feb 27, 2020
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...
- Publication number 20200013612
- Publication date Jan 9, 2020
- ASM IP HOLDING B.V.
- Timothee Julien Vincent Blanquart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING VERTICAL SPACERS FOR SPACER-DEFINED PATTERNING
- Publication number 20190172718
- Publication date Jun 6, 2019
- ASM IP HOLDING B.V.
- Tomohiro Kubota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...
- Publication number 20190093221
- Publication date Mar 28, 2019
- ASM IP HOLDING B.V.
- Lucian Jdira
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND PATTERNING METHOD
- Publication number 20190074172
- Publication date Mar 7, 2019
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWER PLATE, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESS...
- Publication number 20180282869
- Publication date Oct 4, 2018
- ASM IP HOLDING B.V.
- Yoshio SUSA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20180286638
- Publication date Oct 4, 2018
- ASM IP HOLDING B.V.
- Yoshio SUSA
- H01 - BASIC ELECTRIC ELEMENTS

Yoshio SUSA

Person

Patents Grantslast 30 patents

Method of forming high aspect ratio features

Methods for forming a laminate film by cyclical plasma-enhanced dep...

Structures including multiple carbon layers and methods of forming...

Method for depositing silicon-free carbon-containing film as gap-fi...

Method of depositing carbon-containing material on a surface of a s...

Sensor array, apparatus for dispensing a vapor phase reactant to a...

Substrate processing apparatus

Apparatus for dispensing a vapor phase reactant to a reaction chamb...

Method for depositing silicon-free carbon-containing film as gap-fi...

Film forming method and patterning method

Substrate processing apparatus and method for processing substrate

Method for forming vertical spacers for spacer-defined patterning

Patents Applicationslast 30 patents

METHOD OF FORMING DIELECTRIC MATERIAL LAYER USING PLASMA

METHOD OF FORMING DIELECTRIC MATERIAL LAYER USING PLASMA

METHOD FOR FORMING LAYER ON DIFFERENT-DENSITY PATTERN REGIONS

METHOD FOR FORMING CARBON FILM AND FILM FORMING APPARATUS

METHOD AND SYSTEM FOR SELECTIVELY REMOVING MATERIAL AT AN EDGE OF A...

BEVEL ETCHER USING ATMOSPHERIC PLASMA

METHOD OF FORMING A STRUCTURE INCLUDING A SILICON CARBIDE LAYER

SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...

METHOD OF FILLING GAP WITH FLOWABLE CARBON LAYER

METHODS OF FILLING RECESSES ON SUBSTRATE SURFACE, STRUCTURES FORMED...

METHOD OF FORMING A STRUCTURE INCLUDING SILICON-CARBON MATERIAL, ST...

METHODS FOR FORMING A LAMINATE FILM BY CYCLICAL PLASMA-ENHANCED DEP...

STRUCTURES INCLUDING MULTIPLE CARBON LAYERS AND METHODS OF FORMING...

METHOD OF FORMING A STRUCTURE INCLUDING CARBON MATERIAL, STRUCTURE...

METHOD OF FORMING HIGH ASPECT RATIO FEATURES

METHOD OF DEPOSITING CARBON-CONTAINING MATERIAL ON A SURFACE OF A S...

METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...

SUBSTRATE PROCESSING APPARATUS

SENSOR ARRAY, APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A...

METHOD FOR DEPOSITING SILICON-FREE CARBON-CONTAINING FILM AS GAP-FI...

METHOD FOR FORMING VERTICAL SPACERS FOR SPACER-DEFINED PATTERNING

APPARATUS FOR DISPENSING A VAPOR PHASE REACTANT TO A REACTION CHAMB...

FILM FORMING METHOD AND PATTERNING METHOD

SHOWER PLATE, SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESS...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR PROCESSING SUBSTRATE