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Yoshio Suzaki
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Utsunomiya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Template for imprint and imprint method using template
Patent number
11,415,882
Issue date
Aug 16, 2022
Canon Kabushiki Kaisha
Yoshio Suzaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Charged particle beam writing apparatus and device production method
Patent number
8,624,205
Issue date
Jan 7, 2014
Canon Kabushiki Kaisha
Isamu Seto
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
PROCESSING APPARATUS, MEASUREMENT APPARATUS, LITHOGRAPHY APPARATUS,...
Publication number
20220130028
Publication date
Apr 28, 2022
Canon Kabushiki Kaisha
Satoru Jimbo
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TEMPLATE FOR IMPRINT AND IMPRINT METHOD USING TEMPLATE
Publication number
20210173302
Publication date
Jun 10, 2021
Canon Kabushiki Kaisha
Yoshio Suzaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS AND DEVICE PRODUCTION METHOD
Publication number
20100178602
Publication date
Jul 15, 2010
Canon Kabushiki Kaisha
Isamu Seto
B82 - NANO-TECHNOLOGY