Yoshio Tominaga

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma generating apparatus and semiconductor manufacturing method
- Patent number 6,380,684
- Issue date Apr 30, 2002
- Hitachi Kokusai Electric Inc.
- Yunlong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system
- Patent number 6,376,796
- Issue date Apr 23, 2002
- Anelva Corporation
- Noriyoshi Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Plasma processing system
- Publication number 20010026575
- Publication date Oct 4, 2001
- Noriyoshi Sato
- H01 - BASIC ELECTRIC ELEMENTS