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Yoshiro SUEMITSU
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Tokyo, JP
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Patents Grants
last 30 patents
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Patent Grant
Operating method of vacuum processing apparatus
Patent number
12,062,564
Issue date
Aug 13, 2024
HITACHI HIGH-TECH CORPORATION
Daichi Naiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operating method of vacuum processing apparatus
Patent number
11,164,766
Issue date
Nov 2, 2021
HITACHI HIGH-TECH CORPORATION
Yoshikazu Saigou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Operation method for vacuum processing apparatus
Patent number
9,257,318
Issue date
Feb 9, 2016
Hitachi High-Technologies Corporation
Michinori Kawaguchi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Vacuum processing device and method of transporting process subject...
Patent number
8,588,962
Issue date
Nov 19, 2013
Hitachi High-Technologies Corporation
Keita Nogi
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
Publication number
20230215751
Publication date
Jul 6, 2023
Hitachi High-Tech Corporation
Daichi Naiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
Publication number
20210151336
Publication date
May 20, 2021
Hitachi High-Technologies Corporation
Yoshikazu SAIGOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATION METHOD FOR VACUUM PROCESSING APPARATUS
Publication number
20140294555
Publication date
Oct 2, 2014
Hitachi High-Technologies Corporation
Michinori KAWAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD
Publication number
20140099176
Publication date
Apr 10, 2014
Hitachi High-Technologies Corporation
Keita NOGI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM PROCESSING DEVICE AND METHOD OF TRANSPORTING PROCESS SUBJECT...
Publication number
20130108400
Publication date
May 2, 2013
Hitachi High-Technologies Corporation
Keita NOGI
H01 - BASIC ELECTRIC ELEMENTS