Yoshiro Yamanaka

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Shizuoka, JP

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Patents Grantslast 30 patents

Information Patent Grant
Heat transfer plate and writing apparatus
- Patent number 10,236,158
- Issue date Mar 19, 2019
- NuFlare Technology, Inc.
- Kenichi Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ozone supplying apparatus, ozone supplying method, and charged part...
- Patent number 9,401,261
- Issue date Jul 26, 2016
- NuFlare Technology, Inc.
- Yasuyuki Taneda
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method for detecting substrate position of charged particle beam ph...
- Patent number 8,237,139
- Issue date Aug 7, 2012
- Nuflare Technology, Inc.
- Kota Fujiwara
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Substrate earthing mechanism for use in charged-particle beam writi...
- Patent number 7,922,501
- Issue date Apr 12, 2011
- Nuflare Technology, Inc.
- Yoshiro Yamanaka
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DISCHARGE DETECTION APPARATUS AND CHARGED PARTICLE BEAM IRRADIATION...
- Publication number 20230064343
- Publication date Mar 2, 2023
- NuFlare Technology, Inc.
- Tatsuya MUROFUSHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEAT TRANSFER PLATE AND WRITING APPARATUS
- Publication number 20170372869
- Publication date Dec 28, 2017
- NuFlare Technology, Inc.
- Kenichi KATAOKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OZONE SUPPLYING APPARATUS, OZONE SUPPLYING METHOD, AND CHARGED PART...
- Publication number 20160086768
- Publication date Mar 24, 2016
- NuFlare Technology, Inc.
- Yasuyuki TANEDA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR DETECTING SUBSTRATE POSITION OF CHARGED PARTICLE BEAM PH...
- Publication number 20100290023
- Publication date Nov 18, 2010
- NuFlare Technology, Inc.
- Kota FUJIWARA
- B82 - NANO-TECHNOLOGY
Information Patent Application
SUBSTRATE EARTHING MECHANISM FOR USE IN CHARGED-PARTICLE BEAM WRITI...
- Publication number 20070228525
- Publication date Oct 4, 2007
- NuFlare Technology, Inc.
- Yoshiro Yamanaka
- B82 - NANO-TECHNOLOGY