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Yoshitada HONDA
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Sapporo City, JP
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last 30 patents
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Patent Grant
Clean-room monitoring device and method for monitoring clean-room
Patent number
9,704,367
Issue date
Jul 11, 2017
Tokyo Electron Limited
Atsushi Suzuki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
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last 30 patents
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Patent Application
Clean-Room Monitoring Device and Method for Monitoring Clean-Room
Publication number
20150124092
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Atsushi SUZUKI
H04 - ELECTRIC COMMUNICATION TECHNIQUE