Yoshitaka Amano

Person

Ehime, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Ion implantation apparatus
- Patent number 9,431,214
- Issue date Aug 30, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 9,336,992
- Issue date May 10, 2016
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshitaka Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus
- Patent number 9,208,991
- Issue date Dec 8, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam processing apparatus
- Patent number 7,982,192
- Issue date Jul 19, 2011
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and method of converging/shaping ion bea...
- Patent number 7,755,067
- Issue date Jul 13, 2010
- Sen Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic beam deflection scanner and beam deflection scanning...
- Patent number 7,687,782
- Issue date Mar 30, 2010
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam deflecting method, beam deflector for scanning, ion implantati...
- Patent number 7,138,641
- Issue date Nov 21, 2006
- Sumitomo Eaton Nova Corporation
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing method and apparatus therefor
- Patent number 6,797,968
- Issue date Sep 28, 2004
- Sumitomo Eaton Nova Corporation
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150371822
- Publication date Dec 24, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Yoshitaka Amano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150340197
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150340202
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-ENERGY ION IMPLANTER, BEAM COLLIMATOR, AND BEAM COLLIMATION ME...
- Publication number 20150228454
- Publication date Aug 13, 2015
- SEN Corporation
- Kouji Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM PROCESSING APPARATUS
- Publication number 20080258074
- Publication date Oct 23, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni TSUKIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implantation Apparatus and Method of Converging/Shaping Ion Bea...
- Publication number 20080251734
- Publication date Oct 16, 2008
- SEN Corporation, an SHI and Axcelis Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic beam deflection scanner and beam deflection scanning...
- Publication number 20080067404
- Publication date Mar 20, 2008
- SEN Corporation, an SHI and AXCELIS Company
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam deflecting method, beam deflector for scanning, ion implantati...
- Publication number 20060113490
- Publication date Jun 1, 2006
- SUMITOMO EATON NOVA CORPORATION
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion beam processing method and apparatus therefor
- Publication number 20030122090
- Publication date Jul 3, 2003
- SUMITOMO EATON NOVA CORPORATION
- Mitsukuni Tsukihara
- H01 - BASIC ELECTRIC ELEMENTS

Yoshitaka Amano

Person

Patents Grantslast 30 patents

Ion implantation apparatus

Ion implantation apparatus

Ion implantation apparatus

Beam processing apparatus

Ion implantation apparatus and method of converging/shaping ion bea...

Electrostatic beam deflection scanner and beam deflection scanning...

Beam deflecting method, beam deflector for scanning, ion implantati...

Ion beam processing method and apparatus therefor

Patents Applicationslast 30 patents

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS

ION IMPLANTATION APPARATUS

HIGH-ENERGY ION IMPLANTER, BEAM COLLIMATOR, AND BEAM COLLIMATION ME...

BEAM PROCESSING APPARATUS

Ion Implantation Apparatus and Method of Converging/Shaping Ion Bea...

Electrostatic beam deflection scanner and beam deflection scanning...

Beam deflecting method, beam deflector for scanning, ion implantati...

Ion beam processing method and apparatus therefor