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Yoshitaka Enoki
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Iwate, JP
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last 30 patents
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Patent Grant
Deposition method
Patent number
11,328,901
Issue date
May 10, 2022
Tokyo Electron Limited
Shigehiro Miura
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus and method of forming thin film including adsorption step...
Patent number
8,778,812
Issue date
Jul 15, 2014
Tokyo Electron Limited
Haruhiko Furuya
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
DEPOSITION METHOD
Publication number
20200312621
Publication date
Oct 1, 2020
TOKYO ELECTRON LIMITED
Shigehiro MIURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
FILM DEPOSITION METHOD
Publication number
20130164945
Publication date
Jun 27, 2013
TOKYO ELECTRON LIMITED
Haruhiko FURUYA
H01 - BASIC ELECTRIC ELEMENTS