Yoshitaka Enoki

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Iwate, JP

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Patents Grantslast 30 patents

Information Patent Grant
Deposition method
- Patent number 11,328,901
- Issue date May 10, 2022
- Tokyo Electron Limited
- Shigehiro Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of forming thin film including adsorption step...
- Patent number 8,778,812
- Issue date Jul 15, 2014
- Tokyo Electron Limited
- Haruhiko Furuya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION METHOD
- Publication number 20200312621
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Shigehiro MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION METHOD
- Publication number 20130164945
- Publication date Jun 27, 2013
- TOKYO ELECTRON LIMITED
- Haruhiko FURUYA
- H01 - BASIC ELECTRIC ELEMENTS