Yoshitaka Hara

Person

Koshi-Shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Coating method, coating device, and storage medium
- Patent number 8,940,365
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Akira Miyata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus, substrate treatment method and non-t...
- Patent number 8,885,140
- Issue date Nov 11, 2014
- Tokyo Electron Limited
- Tomohiro Nakashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of application and development
- Patent number 8,863,373
- Issue date Oct 21, 2014
- Tokyo Electron Limited
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing apparatus, wet processing method and storage medium
- Patent number 8,722,152
- Issue date May 13, 2014
- Tokyo Electron Limited
- Naofumi Kishita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Wet processing apparatus, wet processing method and storage medium
- Patent number 8,522,714
- Issue date Sep 3, 2013
- Tokyo Electron Limited
- Naofumi Kishita
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate convey processing device, trouble countermeasure method i...
- Patent number 8,393,845
- Issue date Mar 12, 2013
- Tokyo Electron Limited
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system control method of controlling coating...
- Patent number 8,377,501
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet-processing apparatus, wet-processing method and storage medium
- Patent number 8,057,114
- Issue date Nov 15, 2011
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system, coating and developing method and st...
- Patent number 8,025,023
- Issue date Sep 27, 2011
- Tokyo Electron Limited
- Yasushi Hayashida
- G05 - CONTROLLING REGULATING
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 7,934,880
- Issue date May 3, 2011
- Tokyo Electron Limited
- Yoshitaka Hara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 7,880,859
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Yasushi Hayashida
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method of application and development
- Patent number 7,841,072
- Issue date Nov 30, 2010
- Tokyo Electron Limited
- Nobuaki Matsuoka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate collection method and substrate treatment apparatus
- Patent number 7,840,299
- Issue date Nov 23, 2010
- Tokyo Electron Limited
- Makio Higashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing system, and method of control therefor, contro...
- Patent number 7,729,798
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Yasushi Hayashida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Coating method and coating apparatus
- Patent number 7,678,417
- Issue date Mar 16, 2010
- Tokyo Electron Limited
- Yoshitaka Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 7,645,713
- Issue date Jan 12, 2010
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus, coating and developing method, an...
- Patent number 7,645,081
- Issue date Jan 12, 2010
- Tokyo Electron Limited
- Yoshitaka Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing system, coating and developing method and st...
- Patent number 7,597,492
- Issue date Oct 6, 2009
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating and developing apparatus and coating and developing method
- Patent number 7,262,829
- Issue date Aug 28, 2007
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method of collecting substrates abnormally processed...
- Patent number 6,405,094
- Issue date Jun 11, 2002
- Tokyo Electron Limited
- Issei Ueda
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20130273256
- Publication date Oct 17, 2013
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND NON-T...
- Publication number 20130057836
- Publication date Mar 7, 2013
- TOKYO ELECTRON LIMITED
- Tomohiro NAKASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD, COATING DEVICE, AND STORAGE MEDIUM
- Publication number 20120164572
- Publication date Jun 28, 2012
- TOKYO ELECTRON LIMITED
- Akira MIYATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM
- Publication number 20110217473
- Publication date Sep 8, 2011
- TOKYO ELECTRON LIMITED
- Naofumi KISHITA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT
- Publication number 20110032494
- Publication date Feb 10, 2011
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20100061718
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Yoshitaka Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20100063623
- Publication date Mar 11, 2010
- TOKYO ELECTRON LIMITED
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING SYSTEM CONTROL METHOD OF CONTROLLING COATING...
- Publication number 20100021621
- Publication date Jan 28, 2010
- Tokyo Electron Limited
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...
- Publication number 20090059187
- Publication date Mar 5, 2009
- TOKYO ELECTRON LIMITED
- Yoshitaka Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CONVEY PROCESSING DEVICE, TROUBLE COUNTERMEASURE METHOD I...
- Publication number 20090016860
- Publication date Jan 15, 2009
- TOKYO ELECTRON LIMITED
- Tomohiro Kaneko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system, coating and developing method and st...
- Publication number 20080129968
- Publication date Jun 5, 2008
- TOKYO ELECTRON LIMITED
- Yasushi Hayashida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Wet-processing apparatus, wet-processing method and storage medium
- Publication number 20080070164
- Publication date Mar 20, 2008
- TOKYO ELECTRON LIMITED
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing system, coating and developing method and st...
- Publication number 20080026153
- Publication date Jan 31, 2008
- TOKYO ELECTRON LIMITED
- Yasushi Hayashida
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate Collection Method and Substrate Treatment Apparatus
- Publication number 20080020315
- Publication date Jan 24, 2008
- TOKYO ELECTRON LIMITED
- Makio Higashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system and substrate processing method
- Publication number 20060276046
- Publication date Dec 7, 2006
- TOKYO ELECTON LIMITED
- Yasushi Hayashida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating method and coating apparatus
- Publication number 20060251817
- Publication date Nov 9, 2006
- TOKYO ELECTRON LIMITED
- Yoshitaka Hara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrated processing system, and method of control therefor, contr...
- Publication number 20060228195
- Publication date Oct 12, 2006
- Yasushi Hayashida
- G05 - CONTROLLING REGULATING
Information Patent Application
Apparatus and method of application and development
- Publication number 20060213052
- Publication date Sep 28, 2006
- TOKYO ELECTRON LIMITED
- Nobuaki Matsuoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coating and developing apparatus and coating and developing method
- Publication number 20060183340
- Publication date Aug 17, 2006
- TOKYO ELECTRON LIMITED
- Yasushi Hayashida
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshitaka Hara

Person

Patents Grantslast 30 patents

Coating method, coating device, and storage medium

Substrate treatment apparatus, substrate treatment method and non-t...

Apparatus and method of application and development

Wet processing apparatus, wet processing method and storage medium

Wet processing apparatus, wet processing method and storage medium

Substrate convey processing device, trouble countermeasure method i...

Coating and developing system control method of controlling coating...

Wet-processing apparatus, wet-processing method and storage medium

Coating and developing system, coating and developing method and st...

Coating and developing apparatus, coating and developing method, an...

Substrate processing system and substrate processing method

Apparatus and method of application and development

Substrate collection method and substrate treatment apparatus

Substrate processing system, and method of control therefor, contro...

Coating method and coating apparatus

Substrate processing system and substrate processing method

Coating and developing apparatus, coating and developing method, an...

Coating and developing system, coating and developing method and st...

Coating and developing apparatus and coating and developing method

Apparatus and method of collecting substrates abnormally processed...

Patents Applicationslast 30 patents

WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM

SUBSTRATE TREATMENT APPARATUS, SUBSTRATE TREATMENT METHOD AND NON-T...

COATING METHOD, COATING DEVICE, AND STORAGE MEDIUM

WET PROCESSING APPARATUS, WET PROCESSING METHOD AND STORAGE MEDIUM

APPARATUS AND METHOD OF APPLICATION AND DEVELOPMENT

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

COATING AND DEVELOPING SYSTEM CONTROL METHOD OF CONTROLLING COATING...

COATING AND DEVELOPING APPARATUS, COATING AND DEVELOPING METHOD, AN...

SUBSTRATE CONVEY PROCESSING DEVICE, TROUBLE COUNTERMEASURE METHOD I...

Coating and developing system, coating and developing method and st...

Wet-processing apparatus, wet-processing method and storage medium

Coating and developing system, coating and developing method and st...

Substrate Collection Method and Substrate Treatment Apparatus

Substrate processing system and substrate processing method

Coating method and coating apparatus

Substrated processing system, and method of control therefor, contr...

Apparatus and method of application and development

Coating and developing apparatus and coating and developing method