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Yoshitaka Kai
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Kudamatsu-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Vacuum processing apparatus
Patent number
8,033,770
Issue date
Oct 11, 2011
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
7,862,289
Issue date
Jan 4, 2011
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing method
Patent number
7,476,073
Issue date
Jan 13, 2009
Hitachi High-Technologies Corporation
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus and vacuum processing method
Patent number
7,112,805
Issue date
Sep 26, 2006
Hitachi High-Technologies Corporation
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Vacuum Processing Apparatus And Vacuum Processing Method
Publication number
20110299962
Publication date
Dec 8, 2011
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20090010738
Publication date
Jan 8, 2009
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20090003978
Publication date
Jan 1, 2009
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20070023683
Publication date
Feb 1, 2007
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method and apparatus
Publication number
20060032585
Publication date
Feb 16, 2006
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20050218337
Publication date
Oct 6, 2005
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Vacuum processing apparatus and vacuum processing method
Publication number
20050220575
Publication date
Oct 6, 2005
Takeshi Oono
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma processing method and apparatus
Publication number
20050014380
Publication date
Jan 20, 2005
Yoshitaka Kai
H01 - BASIC ELECTRIC ELEMENTS