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Yoshitaka KAWAGUCHI

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  • Miyagi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Gas supply control method
    • Patent number 9,904,299
    • Issue date Feb 27, 2018
    • Tokyo Electron Limited
    • Kumiko Ono
    • G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

  • Information Patent Application

    GAS SUPPLY CONTROL METHOD
    • Publication number 20160299514
    • Publication date Oct 13, 2016
    • TOKYO ELECTRON LIMITED
    • Kumiko ONO
    • G05 - CONTROLLING REGULATING