Yoshitaka KAWAHARA

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, liquid precursor replenishment syst...
- Patent number 10,876,207
- Issue date Dec 29, 2020
- Kokusai Electric Corporation
- Noriyuki Isobe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, LIQUID PRECURSOR REPLENISHMENT SYST...
- Publication number 20190211449
- Publication date Jul 11, 2019
- Hitachi Kokusai Electric Inc.
- Noriyuki ISOBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...