Yoshitaka KITAGAWA

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Patents Grantslast 30 patents

Information Patent Grant
Cover for swing member of substrate processing apparatus, swing mem...
- Patent number 11,626,299
- Issue date Apr 11, 2023
- Ebara Corporation
- Yoshitaka Kitagawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate processing apparatus X
- Patent number 10,361,101
- Issue date Jul 23, 2019
- Ebara Corporation
- Yoshitaka Kitagawa
- A46 - BRUSHWARE

Patents Applicationslast 30 patents

Information Patent Application
POLISHING DEVICE AND METHOD FOR ADJUSTING PRESSURE CONTROL UNIT
- Publication number 20240207995
- Publication date Jun 27, 2024
- EBARA CORPORATION
- YOSHITAKA KITAGAWA
- B24 - GRINDING POLISHING
Information Patent Application
COVER FOR SWING MEMBER OF SUBSTRATE PROCESSING APPARATUS, SWING MEM...
- Publication number 20200402820
- Publication date Dec 24, 2020
- EBARA CORPORATION
- Yoshitaka KITAGAWA
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS X
- Publication number 20180090347
- Publication date Mar 29, 2018
- EBARA CORPORATION
- Yoshitaka KITAGAWA
- B08 - CLEANING