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Yoshitaka Konishi
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Koshi-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing control method, substrate processing apparatus...
Patent number
11,862,496
Issue date
Jan 2, 2024
Tokyo Electron Limited
Toyohisa Tsuruda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus, substrate processing method, and st...
Patent number
10,795,265
Issue date
Oct 6, 2020
Tokyo Electron Limited
Norihisa Koga
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Clean-room monitoring device and method for monitoring clean-room
Patent number
9,704,367
Issue date
Jul 11, 2017
Tokyo Electron Limited
Atsushi Suzuki
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Grant
Temperature setting method and apparatus for a thermal processing p...
Patent number
8,135,487
Issue date
Mar 13, 2012
Tokyo Electron Limited
Megumi Jyousaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature setting method for thermal processing plate, temperatur...
Patent number
7,957,828
Issue date
Jun 7, 2011
Tokyo Electron Limited
Masahide Tadokoro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature setting method of thermal processing plate, computer-re...
Patent number
7,897,897
Issue date
Mar 1, 2011
Tokyo Electron Limited
Megumi Jyousaka
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
Publication number
20240087928
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Toyohisa TSURUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING CONTROL METHOD, SUBSTRATE PROCESSING APPARATUS...
Publication number
20210090919
Publication date
Mar 25, 2021
TOKYO ELECTRON LIMITED
Toyohisa TSURUDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ST...
Publication number
20200041913
Publication date
Feb 6, 2020
TOKYO ELECTRON LIMITED
Norihisa KOGA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Clean-Room Monitoring Device and Method for Monitoring Clean-Room
Publication number
20150124092
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Atsushi SUZUKI
H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information
Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
Publication number
20080257495
Publication date
Oct 23, 2008
TOKYO ELECTRON LIMITED
Masahide Tadokoro
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
TEMPERATURE SETTING METHOD FOR THERMAL PROCESSING PLATE, TEMPERATUR...
Publication number
20080257496
Publication date
Oct 23, 2008
TOKYO ELECTRON LIMITED
Megumi JYOUSAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPERATURE SETTING METHOD OF THERMAL PROCESSING PLATE, COMPUTER-RE...
Publication number
20080116195
Publication date
May 22, 2008
TOKYO ELECTRON LIMITED
Megumi Jyousaka
G05 - CONTROLLING REGULATING