Yoshitaka Matsuda

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Kumamoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treating method
- Patent number 6,451,515
- Issue date Sep 17, 2002
- Tokyo Electron Limited
- Hideyuki Takamori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,398,879
- Issue date Jun 4, 2002
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate cleaning unit and cleaning method
- Patent number 6,261,378
- Issue date Jul 17, 2001
- Tokyo Electron Limited
- Hiroshi Hashimoto
- B08 - CLEANING
Information Patent Grant
Method and apparatus for cleaning treatment
- Patent number 6,159,288
- Issue date Dec 12, 2000
- Tokyo Electron Limited
- Fumio Satou
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Apparatus and method for supplying process solution to surface of s...
- Patent number 5,945,161
- Issue date Aug 31, 1999
- Tokyo Electron Limited
- Hiroshi Hashimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating a substrate with resist and resist-treating...
- Patent number 5,906,860
- Issue date May 25, 1999
- Tokyo Electron Limited
- Kimio Motoda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Substrate treating method
- Publication number 20020187423
- Publication date Dec 12, 2002
- HIDEYUKI TAKAMORI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20010049070
- Publication date Dec 6, 2001
- HIDEYUKI TAKAMORI
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...