TREA

Yoshitaka MORI

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  • Nirasaki City, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Film forming method and film forming apparatus
    • Patent number 8,753,717
    • Issue date Jun 17, 2014
    • Tokyo Electron Limited
    • Keisuke Suzuki
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    APPARATUS AND METHOD OF FORMING SILICON NITRIDE FILM
    • Publication number 20150243492
    • Publication date Aug 27, 2015
    • TOKYO ELECTRON LIMITED
    • Tetsushi OZAKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING METHOD AND FILM FORMING APPARATUS
    • Publication number 20120321791
    • Publication date Dec 20, 2012
    • TOKYO ELECTRON LIMITED
    • Keisuke SUZUKI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...