Yoshitaka Saita

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for etching Si
- Patent number 6,972,264
- Issue date Dec 6, 2005
- Tokyo Electron Limited
- Yoshitaka Saita
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for etching Si
- Publication number 20060021704
- Publication date Feb 2, 2006
- TOKYO ELECTRON LIMITED
- Yoshitaka Saita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for etching Si
- Publication number 20040048487
- Publication date Mar 11, 2004
- TOKYO ELECTRON LIMITED
- Yoshitaka Saita
- H01 - BASIC ELECTRIC ELEMENTS