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Yoshiteru Fukuda
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
12,036,585
Issue date
Jul 16, 2024
Tokyo Electron Limited
Tadashi Iino
B08 - CLEANING
Information
Patent Grant
Liquid processing method, substrate processing apparatus, and stora...
Patent number
10,867,814
Issue date
Dec 15, 2020
Tokyo Electron Limited
Yosuke Kawabuchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dye adsorption apparatus and dye adsorption method
Patent number
9,093,222
Issue date
Jul 28, 2015
Tokyo Electron Limited
Goro Furutani
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Coating treatment method and coating treatment apparatus
Patent number
8,697,187
Issue date
Apr 15, 2014
Tokyo Electron Limited
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Heat processing method, computer-readable storage medium, and heat...
Patent number
8,138,456
Issue date
Mar 20, 2012
Tokyo Electron Limited
Yoshiteru Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of processing a substrate and apparatus processing the same
Patent number
7,976,896
Issue date
Jul 12, 2011
Tokyo Electron Limited
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating treatment method and coating treatment apparatus
Patent number
7,832,352
Issue date
Nov 16, 2010
Tokyo Electron Limited
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Coating process method and coating process apparatus
Patent number
7,485,188
Issue date
Feb 3, 2009
Tokyo Electron Limited
Takashi Takekuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Coating treatment apparatus and coating treatment method
Patent number
7,479,190
Issue date
Jan 20, 2009
Tokyo Electron Limited
Yoshiteru Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20210229135
Publication date
Jul 29, 2021
TOKYO ELECTRON LIMITED
Tadashi Iino
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING METHOD, SUBSTRATE PROCESSING APPARATUS, AND STORA...
Publication number
20170236729
Publication date
Aug 17, 2017
TOKYO ELECTRON LIMITED
Yosuke Kawabuchi
B08 - CLEANING
Information
Patent Application
DYE ADSORPTION DEVICE, DYE ADSORPTION METHOD AND SUBSTRATE TREATMEN...
Publication number
20130323934
Publication date
Dec 5, 2013
TOKYO ELECTRON LIMITED
Norio Wada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DYE ADSORPTION APPARATUS AND DYE ADSORPTION METHOD
Publication number
20130316485
Publication date
Nov 28, 2013
TOKYO ELECTRON LIMITED
Goro Furutani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COATING TREATMENT METHOD AND COATING TREATMENT APPARATUS
Publication number
20110033626
Publication date
Feb 10, 2011
TOKYO ELECTRON LIMITED
Yoshiteru FUKUDA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating Treatment Method and Coating Treatment Apparatus
Publication number
20080193654
Publication date
Aug 14, 2008
TOKYO ELECTRON LIMITED
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HEAT PROCESSING METHOD, COMPUTER-READABLE STORAGE MEDIUM, AND HEAT...
Publication number
20070257085
Publication date
Nov 8, 2007
TOKYO ELECTRON LIMITED
Yoshiteru Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method of processing a substrate and apparatus processing the same
Publication number
20070082134
Publication date
Apr 12, 2007
TOKYO ELECTON LIMITED
Yoshiteru Fukuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Coating process method and coating process apparatus
Publication number
20060144330
Publication date
Jul 6, 2006
Takashi Takekuma
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating treatment apparatus and coating treatment method
Publication number
20060068110
Publication date
Mar 30, 2006
Yoshiteru Fukuda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Coating process method and coating process apparatus
Publication number
20030180444
Publication date
Sep 25, 2003
Takashi Takekuma
H01 - BASIC ELECTRIC ELEMENTS