Yoshito Kamaji

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and prediction method of the condition...
- Patent number 12,080,529
- Issue date Sep 3, 2024
- HITACHI HIGH-TECH CORPORATION
- Yoshito Kamaji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing apparatus and prediction apparatus of the conditi...
- Patent number 11,107,664
- Issue date Aug 31, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshito Kamaji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing apparatus and prediction method of the condition...
- Patent number 10,886,110
- Issue date Jan 5, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshito Kamaji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Plasma processing method
- Patent number 10,184,173
- Issue date Jan 22, 2019
- Hitachi High-Technologies Corporation
- Takahiro Yonemoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARAT...
- Publication number 20240339308
- Publication date Oct 10, 2024
- Satoru Matsukura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIAGNOSIS DEVICE, DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AN...
- Publication number 20240213003
- Publication date Jun 27, 2024
- Hitachi High-Tech Corporation
- Shota UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230110096
- Publication date Apr 13, 2023
- Hitachi High-Tech Corporation
- Anil PANDEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS DIAGNOSTIC APPARATUS, APPARATUS DIAGNOSTIC METHOD, PLASMA...
- Publication number 20220399182
- Publication date Dec 15, 2022
- Hitachi High-Tech Corporation
- Shota Umeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20210358722
- Publication date Nov 18, 2021
- Hitachi High-Technologies Corporation
- Anil Pandey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...
- Publication number 20210082673
- Publication date Mar 18, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshito Kamaji
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION APPARATUS OF THE CONDITI...
- Publication number 20190237309
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Yoshito KAMAJI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...
- Publication number 20190088455
- Publication date Mar 21, 2019
- Hitachi High-Technologies Corporation
- Yoshito KAMAJI
- G06 - COMPUTING CALCULATING COUNTING

Yoshito Kamaji

Person

Patents Grantslast 30 patents

Plasma processing apparatus and prediction method of the condition...

Plasma processing apparatus and prediction apparatus of the conditi...

Plasma processing apparatus and prediction method of the condition...

Plasma processing method

Patents Applicationslast 30 patents

APPARATUS DIAGNOSTIC APPARATUS, SEMICONDUCTOR MANUFACTURING APPARAT...

DIAGNOSIS DEVICE, DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AN...

PLASMA PROCESSING APPARATUS

APPARATUS DIAGNOSTIC APPARATUS, APPARATUS DIAGNOSTIC METHOD, PLASMA...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...

PLASMA PROCESSING APPARATUS AND PREDICTION APPARATUS OF THE CONDITI...

PLASMA PROCESSING APPARATUS AND PREDICTION METHOD OF THE CONDITION...