Yoshitomo Konta

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Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply ring and substrate processing apparatus
- Patent number 12,087,553
- Issue date Sep 10, 2024
- Tokyo Electron Limited
- Yoshitomo Konta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,862,436
- Issue date Jan 2, 2024
- Tokyo Electron Limited
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,791,195
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yoshitomo Konta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,183,371
- Issue date Nov 23, 2021
- Tokyo Electron Limited
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220157642
- Publication date May 19, 2022
- TOKYO ELECTRON LIMITED
- Yoshitomo KONTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220122820
- Publication date Apr 21, 2022
- TOKYO ELECTRON LIMITED
- Yoshitomo Konta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY RING AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20220108873
- Publication date Apr 7, 2022
- TOKYO ELECTRON LIMITED
- Yoshitomo KONTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220044914
- Publication date Feb 10, 2022
- TOKYO ELECTRON LIMITED
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20200211826
- Publication date Jul 2, 2020
- TOKYO ELECTRON LIMITED
- Toru Fujii
- H01 - BASIC ELECTRIC ELEMENTS