Yoshitomo NAGAHASHI

Person

Takasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 9,829,807
- Issue date Nov 28, 2017
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 9,581,913
- Issue date Feb 28, 2017
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 8,896,813
- Issue date Nov 25, 2014
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and method for producing devic...
- Patent number 8,797,502
- Issue date Aug 5, 2014
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 7,973,906
- Issue date Jul 5, 2011
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 7,948,608
- Issue date May 24, 2011
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, method for manufacturing device
- Patent number 7,643,129
- Issue date Jan 5, 2010
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filter apparatus, exposure apparatus, and device-producing method
- Patent number 7,416,574
- Issue date Aug 26, 2008
- Nikon Corporation
- Kenji Udagawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Exposure device, exposure method and device manufacturing method
- Patent number 7,116,396
- Issue date Oct 3, 2006
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure system and method for manufacturing device
- Patent number 7,106,414
- Issue date Sep 12, 2006
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus
- Patent number 6,922,910
- Issue date Aug 2, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, device manufacturing method and environmental c...
- Patent number 6,784,972
- Issue date Aug 31, 2004
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Environmental control chamber
- Patent number 6,753,942
- Issue date Jun 22, 2004
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE
- Publication number 20180067406
- Publication date Mar 8, 2018
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE
- Publication number 20170160651
- Publication date Jun 8, 2017
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE
- Publication number 20140333909
- Publication date Nov 13, 2014
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND EXPOSURE METHOD, MAINTENANCE METHOD, AND DEV...
- Publication number 20130278908
- Publication date Oct 24, 2013
- Yoshitomo NAGAHASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, method for manufacturing device
- Publication number 20110235006
- Publication date Sep 29, 2011
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus, projection exposure method, and meth...
- Publication number 20110122377
- Publication date May 26, 2011
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus, projection exposure method, and meth...
- Publication number 20100171940
- Publication date Jul 8, 2010
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus, projection exposure method, and meth...
- Publication number 20090190113
- Publication date Jul 30, 2009
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, method for manufacturing device
- Publication number 20090153815
- Publication date Jun 18, 2009
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Atmosphere control apparatus, device-manufacturing apparatus, devic...
- Publication number 20080160895
- Publication date Jul 3, 2008
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus, projection exposure method, and meth...
- Publication number 20080030694
- Publication date Feb 7, 2008
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, method for manufacturing device
- Publication number 20080018869
- Publication date Jan 24, 2008
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and exposure method, maintenance method, and dev...
- Publication number 20070085989
- Publication date Apr 19, 2007
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Atmosphere control apparatus, device-manufacturing apparatus, devic...
- Publication number 20060274291
- Publication date Dec 7, 2006
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, exposure method, method for manufacturing device
- Publication number 20060187433
- Publication date Aug 24, 2006
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Projection exposure apparatus, projection exposure method, and meth...
- Publication number 20060164617
- Publication date Jul 27, 2006
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Filter apparatus, exposure apparatus, and device-producing method
- Publication number 20060156927
- Publication date Jul 20, 2006
- Nikon Corporation
- Kenji Udagawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Exposure system and device production process
- Publication number 20060007415
- Publication date Jan 12, 2006
- Nikon Corporation
- Junichi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure device, exposure method and device manufacturing method
- Publication number 20050140959
- Publication date Jun 30, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure system and method for manufacturing device
- Publication number 20050140946
- Publication date Jun 30, 2005
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure system and device production process
- Publication number 20050088634
- Publication date Apr 28, 2005
- Nikon Corporation
- Junichi Kosugi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure Apparatus
- Publication number 20040055177
- Publication date Mar 25, 2004
- Nikon Corporation
- Toshihiko Tsuji
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental control chamber
- Publication number 20030058417
- Publication date Mar 27, 2003
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, holder container, device manufacturing method,...
- Publication number 20020074635
- Publication date Jun 20, 2002
- Nikon Corporation
- Ken Hattori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus, device manufacturing method and environmental c...
- Publication number 20020050572
- Publication date May 2, 2002
- Nikon Corporation
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus, lithography system and conveying method, and de...
- Publication number 20020024647
- Publication date Feb 28, 2002
- Nikon Corporation
- Kanefumi Nakahara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Environmental control chamber
- Publication number 20010048513
- Publication date Dec 6, 2001
- Yoshitomo Nagahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Yoshitomo NAGAHASHI

Person

Patents Grantslast 30 patents

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus, exposure method, and method for producing devic...

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus, exposure method, method for manufacturing device

Filter apparatus, exposure apparatus, and device-producing method

Exposure device, exposure method and device manufacturing method

Exposure system and method for manufacturing device

Exposure apparatus

Exposure apparatus, device manufacturing method and environmental c...

Environmental control chamber

Patents Applicationslast 30 patents

EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE

EXPOSURE APPARATUS, EXPOSURE METHOD, METHOD FOR MANUFACTURING DEVICE

EXPOSURE APPARATUS AND EXPOSURE METHOD, MAINTENANCE METHOD, AND DEV...

Exposure apparatus, exposure method, method for manufacturing device

Projection exposure apparatus, projection exposure method, and meth...

Projection exposure apparatus, projection exposure method, and meth...

Projection exposure apparatus, projection exposure method, and meth...

Exposure apparatus, exposure method, method for manufacturing device

Atmosphere control apparatus, device-manufacturing apparatus, devic...

Projection exposure apparatus, projection exposure method, and meth...

Exposure apparatus, exposure method, method for manufacturing device

Exposure apparatus and exposure method, maintenance method, and dev...

Atmosphere control apparatus, device-manufacturing apparatus, devic...

Exposure apparatus, exposure method, method for manufacturing device

Projection exposure apparatus, projection exposure method, and meth...

Filter apparatus, exposure apparatus, and device-producing method

Exposure system and device production process

Exposure device, exposure method and device manufacturing method

Exposure system and method for manufacturing device

Exposure system and device production process

Exposure Apparatus

Environmental control chamber

Exposure apparatus, holder container, device manufacturing method,...

Exposure apparatus, device manufacturing method and environmental c...

Exposure apparatus, lithography system and conveying method, and de...

Environmental control chamber