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Yoshitomo Sato
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Koshi City, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Substrate processing apparatus
Patent number
11,094,569
Issue date
Aug 17, 2021
Tokyo Electron Limited
Yoshitomo Sato
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
Patent number
9,082,614
Issue date
Jul 14, 2015
Tokyo Electron Limited
Shinichi Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Periphery coating apparatus, periphery coating method and storage m...
Patent number
9,027,508
Issue date
May 12, 2015
Tokyo Electron Limited
Shinichi Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240395570
Publication date
Nov 28, 2024
TOKYO ELECTRON LIMITED
Yoshitomo SATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20240307925
Publication date
Sep 19, 2024
TOKYO ELECTRON LIMITED
Yoshitomo Sato
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND RE...
Publication number
20240004301
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Yoshitomo Sato
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20190057890
Publication date
Feb 21, 2019
TOKYO ELECTRON LIMITED
Yoshitomo Sato
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
Publication number
20150214046
Publication date
Jul 30, 2015
TOKYO ELECTRON LIMITED
Shinichi Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PERIPHERY COATING APPARATUS, PERIPHERY COATING METHOD AND STORAGE M...
Publication number
20140154890
Publication date
Jun 5, 2014
TOKYO ELECTRON LIMITED
Shinichi Hatakeyama
H01 - BASIC ELECTRIC ELEMENTS