Yoshitsugu Kawamura

Person

  • Kanagawa, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Processing apparatus for substrates

    • Patent number 5,980,684
    • Issue date Nov 9, 1999
    • Tokyo Ohka Co., Ltd.
    • Hisashi Hori
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma processing apparatus

    • Patent number 5,709,519
    • Issue date Jan 20, 1998
    • Tokyo Ohka Kogyo Co., Ltd.
    • Akira Uehara
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents