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Yoshitsugu Tanaka
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Nirasaki-shi, JP
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last 30 patents
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Patent Grant
Select transistor, method for making select transistor, memory devi...
Patent number
8,785,334
Issue date
Jul 22, 2014
Tokyo Electron Limited
Yoshitsugu Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Fabrication method of semiconductor device
Patent number
8,741,786
Issue date
Jun 3, 2014
Tokyo Electron Limited
Koji Akiyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of fin-type field effect transistor
Patent number
7,955,922
Issue date
Jun 7, 2011
Tokyo Electron Limited
Hajime Nakabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid treatment system and liquid treatment method
Patent number
6,634,370
Issue date
Oct 21, 2003
Tokyo Electron Limited
Satoshi Nakashima
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum processing apparatus for semiconductor process
Patent number
6,565,662
Issue date
May 20, 2003
Tokyo Electron Limited
Kenji Amano
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
FABRICATION METHOD OF SEMICONDUCTOR DEVICE
Publication number
20120309207
Publication date
Dec 6, 2012
TOKYO ELECTRON LIMITED
Koji AKIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECT TRANSISTOR, METHOD FOR MAKING SELECT TRANSISTOR, MEMORY DEVI...
Publication number
20120299085
Publication date
Nov 29, 2012
TOKYO ELECTRON LIMITED
Yoshitsugu TANAKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF FIN-TYPE FIELD EFFECT TRANSISTOR
Publication number
20080171407
Publication date
Jul 17, 2008
TOKYO ELECTRON LIMITED
Hajime Nakabayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Liquid treatment system and liquid treatment method
Publication number
20010037764
Publication date
Nov 8, 2001
Satoshi Nakashima
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
Vacuum processing apparatus for semiconductor process
Publication number
20010006094
Publication date
Jul 5, 2001
Kenji Amano
H01 - BASIC ELECTRIC ELEMENTS