Yoshiya Kitagawa

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Yokohama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Developer waste liquid regenerating apparatus and method
- Patent number 6,875,359
- Issue date Apr 5, 2005
- Nagase & Co., Ltd.
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
Developer waste liquid regenerating apparatus and method
- Publication number 20040099602
- Publication date May 27, 2004
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Regenerating apparatus and method for resist stripping waste liquids
- Publication number 20030141246
- Publication date Jul 31, 2003
- Shu Ogawa
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL