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Yoshiyasu Kato

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  • Nirasaki-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Dummy wafer
    • Patent number 11,776,829
    • Issue date Oct 3, 2023
    • Tokyo Electron Limited
    • Shigeru Kasai
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Probe device
    • Patent number 9,759,762
    • Issue date Sep 12, 2017
    • Tokyo Electron Limited
    • Eiichi Shinohara
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Probe device having cleaning mechanism for cleaning connection cond...
    • Patent number 9,638,719
    • Issue date May 2, 2017
    • Tokyo Electron Limited
    • Eiichi Shinohara
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Probe apparatus
    • Patent number 9,261,553
    • Issue date Feb 16, 2016
    • Tokyo Electron Limited
    • Eiichi Shinohara
    • G01 - MEASURING TESTING
  • Information Patent Grant

    Carrier supporting apparatus
    • Patent number 8,678,739
    • Issue date Mar 25, 2014
    • Tokyo Electron Limited
    • Ikuo Ogasawara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Wafer chuck
    • Patent number 7,411,384
    • Issue date Aug 12, 2008
    • Tokyo Electron Limited
    • Ikuo Ogasawara
    • G01 - MEASURING TESTING

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD FOR CONTROLLING TEMPERATURE OF SUBSTRATE SUPPORT AND INSPECT...
    • Publication number 20220015193
    • Publication date Jan 13, 2022
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    DUMMY WAFER
    • Publication number 20210265183
    • Publication date Aug 26, 2021
    • TOKYO ELECTRON LIMITED
    • Shigeru KASAI
    • B32 - LAYERED PRODUCTS
  • Information Patent Application

    PROBE DEVICE
    • Publication number 20160061882
    • Publication date Mar 3, 2016
    • TOKYO ELECTRON LIMITED
    • Eiichi SHINOHARA
    • G01 - MEASURING TESTING
  • Information Patent Application

    PROBE DEVICE
    • Publication number 20160054357
    • Publication date Feb 25, 2016
    • TOKYO ELECTRON LIMITED
    • Eiichi SHINOHARA
    • G01 - MEASURING TESTING
  • Information Patent Application

    PROBE APPARATUS
    • Publication number 20150028907
    • Publication date Jan 29, 2015
    • TOKYO ELECTRON LIMITED
    • Eiichi Shinohara
    • G01 - MEASURING TESTING
  • Information Patent Application

    Carrier Supporting Apparatus
    • Publication number 20090245979
    • Publication date Oct 1, 2009
    • Ikuo Ogasawara
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    WAFER CHUCK
    • Publication number 20070152691
    • Publication date Jul 5, 2007
    • TOKYO ELECTRON LIMITED
    • Ikuo OGASAWARA
    • G01 - MEASURING TESTING