Yoshiyasu Sato

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Kurokawa-gun, Miyagi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Gas supply system, plasma processing apparatus, and operation metho...
- Patent number 10,472,717
- Issue date Nov 12, 2019
- Tokyo Electron Limited
- Atsushi Sawachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply system, gas supply control method and gas replacement me...
- Patent number 10,229,844
- Issue date Mar 12, 2019
- Tokyo Electron Limited
- Atsushi Sawachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 9,324,542
- Issue date Apr 26, 2016
- Tokyo Electron Limited
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GAS SUPPLY SYSTEM, GAS CONTROL SYSTEM, PLASMA PROCESSING APPARATUS,...
- Publication number 20240212987
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Atsushi SAWACHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY SYSTEM, PLASMA PROCESSING APPARATUS, AND OPERATION METHO...
- Publication number 20170159180
- Publication date Jun 8, 2017
- TOKYO ELECTRON LIMITED
- Atsushi Sawachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM, GAS SUPPLY CONTROL METHOD AND GAS REPLACEMENT ME...
- Publication number 20160372348
- Publication date Dec 22, 2016
- TOKYO ELECTRON LIMITED
- Atsushi Sawachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20150228459
- Publication date Aug 13, 2015
- TOKYO ELECTRON LIMITED
- Naoki Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS