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Yoshiyasu Tajima
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Shizuoka, JP
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last 30 patents
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Patent Grant
Vacuum processing method and vacuum processing apparatus
Patent number
8,652,970
Issue date
Feb 18, 2014
ULVAC, Inc.
Yoshiyasu Tajima
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
VACUUM PROCESSING METHOD AND VACUUM PROCESSING APPARATUS
Publication number
20110240600
Publication date
Oct 6, 2011
ULVAC ,INC.
Yoshiyasu Tajima
H01 - BASIC ELECTRIC ELEMENTS