Yoshiyuki Fujita

Person

Nirasaki, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Collecting unit for semiconductor process
- Patent number 7,727,296
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Yukio Tojo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Vertical heat processing apparatus and method for using the same
- Patent number 7,575,431
- Issue date Aug 18, 2009
- Tokyo Electron Limited
- Atsushi Endo
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Method of heat treatment
- Patent number 6,635,310
- Issue date Oct 21, 2003
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning film forming apparatus, cleaning system for carr...
- Patent number 6,238,488
- Issue date May 29, 2001
- Tokyo Electron Limited
- Yoshiyuki Fujita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube and exhaustion piping system in he...
- Patent number 5,637,153
- Issue date Jun 10, 1997
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment process for wafers
- Patent number 5,500,388
- Issue date Mar 19, 1996
- Tokyo Electron Kabushiki Kaisha
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning reaction tube
- Patent number 5,380,370
- Issue date Jan 10, 1995
- Tokyo Electron Limited
- Reiji Niino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Collecting unit for semiconductor process
- Publication number 20080104935
- Publication date May 8, 2008
- Yukio Tojo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Vertical heat processing apparatus and method for using the same
- Publication number 20080008566
- Publication date Jan 10, 2008
- Atsushi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of forming oxynitride film or the like and system for carryi...
- Publication number 20010046792
- Publication date Nov 29, 2001
- Yutaka Takahashi
- H01 - BASIC ELECTRIC ELEMENTS

Yoshiyuki Fujita

Person

Patents Grantslast 30 patents

Collecting unit for semiconductor process

Vertical heat processing apparatus and method for using the same

Method of heat treatment

Method of cleaning film forming apparatus, cleaning system for carr...

Method of cleaning reaction tube and exhaustion piping system in he...

Heat treatment process for wafers

Method of cleaning reaction tube

Patents Applicationslast 30 patents

Collecting unit for semiconductor process

Vertical heat processing apparatus and method for using the same

Method of forming oxynitride film or the like and system for carryi...