Yoshiyuki FUJITANI

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Kyoto, JP

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Patents Grantslast 30 patents

Information Patent Grant
Processing liquid supplying apparatus, substrate processing apparat...
- Patent number 11,094,564
- Issue date Aug 17, 2021
- SCREEN Holdings Co., Ltd.
- Shota Iwahata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chemical solution feeder, substrate treatment apparatus, method for...
- Patent number 10,816,141
- Issue date Oct 27, 2020
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate treatment method
- Patent number 9,230,836
- Issue date Jan 5, 2016
- SCREEN Holdings Co., Ltd.
- Ayumi Higuchi
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING LIQUID SUPPLYING APPARATUS, SUBSTRATE PROCESSING APPARAT...
- Publication number 20190131144
- Publication date May 2, 2019
- SCREEN Holdings Co., Ltd.
- Shota IWAHATA
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
CHEMICAL SOLUTION FEEDER, SUBSTRATE TREATMENT APPARATUS, METHOD FOR...
- Publication number 20190056066
- Publication date Feb 21, 2019
- SCREEN Holdings Co., Ltd.
- Ayumi HIGUCHI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20130014787
- Publication date Jan 17, 2013
- Shingo URATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20120240958
- Publication date Sep 27, 2012
- Ayumi HIGUCHI
- B08 - CLEANING