Yoshiyuki Furukawa

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Kaizu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Mass flow rate control apparatus, its calibration method and semico...
- Patent number 7,979,165
- Issue date Jul 12, 2011
- Hitachi Metals, Ltd.
- Takao Gotoh
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
MASS FLOW RATE CONTROL APPARATUS, ITS CALIBRATION METHOD AND SEMICO...
- Publication number 20070233412
- Publication date Oct 4, 2007
- HITACHI METALS, LTD
- Takao Gotoh
- G05 - CONTROLLING REGULATING