Yoshiyuki HIRONAKA

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,062,884
- Issue date Jul 13, 2021
- HITACHI HIGH-TECH CORPORATION
- Yoshiyuki Hironaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220359160
- Publication date Nov 10, 2022
- Hitachi High-Tech Corporation
- Takahiro Ichikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20190393021
- Publication date Dec 26, 2019
- Hitachi High-Technologies Corporation
- Yoshiyuki HIRONAKA
- H01 - BASIC ELECTRIC ELEMENTS