TREA

Yoshiyuki Honda

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  • Kumamoto, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Method of drying substrates and drying apparatus
    • Patent number 6,269,552
    • Issue date Aug 7, 2001
    • Tokyo Electron Limited
    • Yoshiyuki Honda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Spin dryer and substrate drying method
    • Patent number 5,873,177
    • Issue date Feb 23, 1999
    • Tokyo Electron Limited
    • Yoshiyuki Honda
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Transfer machine, transfer method, cleaning machine, and cleaning m...
    • Patent number 5,853,496
    • Issue date Dec 29, 1998
    • Tokyo Electron Limited
    • Yoshiyuki Honda
    • B08 - CLEANING
  • Information Patent Grant

    Substrates-washing apparatus
    • Patent number 5,503,171
    • Issue date Apr 2, 1996
    • Tokyo Electron Limited
    • Kenji Yokomizo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Spindrier
    • Patent number 5,435,075
    • Issue date Jul 25, 1995
    • Tokyo Electron Limited
    • Hirofumi Shiraishi
    • F26 - DRYING
  • Information Patent Grant

    Spindrier
    • Patent number 5,339,539
    • Issue date Aug 23, 1994
    • Tokyo Electron Limited
    • Hirofumi Shiraishi
    • F26 - DRYING
  • Information Patent Grant

    Washing system
    • Patent number 5,301,700
    • Issue date Apr 12, 1994
    • Tokyo Electron Limited
    • Yuuji Kamikawa
    • B08 - CLEANING

Patents Applicationslast 30 patents