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Yoshiyuki Kadokura
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Susono-shi, JP
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Patents Grants
last 30 patents
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Patent Grant
Method of manufacturing semiconductor device
Patent number
9,337,092
Issue date
May 10, 2016
Ulvac, Inc.
Junichi Hamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Sputtering apparatus for filling pores of a circular substrate
Patent number
6,280,585
Issue date
Aug 28, 2001
ULVAC, Inc.
Hisaharu Obinata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Publication number
20150221552
Publication date
Aug 6, 2015
ULVAC, Inc.
Junichi Hamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
Publication number
20140332959
Publication date
Nov 13, 2014
ULVAC, Inc.
Junichi Hamaguchi
H01 - BASIC ELECTRIC ELEMENTS