Yoshiyuki KATO

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and gas supply method therefor
- Patent number 9,236,230
- Issue date Jan 12, 2016
- Tokyo Electron Limited
- Yoshiyuki Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of supplying etching gas and etching apparatus
- Patent number 8,815,106
- Issue date Aug 26, 2014
- Tokyo Electron Limited
- Masahiro Ogasawara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus inspection method and method for red...
- Patent number 7,871,471
- Issue date Jan 18, 2011
- Tokyo Electron Limited
- Yoshiyuki Kato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PLASMA PROCESSING APPARATUS AND GAS SUPPLY METHOD THEREFOR
- Publication number 20120305188
- Publication date Dec 6, 2012
- TOKYO ELECTRON LIMITED
- Yoshiyuki KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SUPPLYING ETCHING GAS AND ETCHING APPARATUS
- Publication number 20120037316
- Publication date Feb 16, 2012
- TOKYO ELECTRON LIMITED
- Masahiro OGASAWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS INSPECTION METHOD AND METHOD FOR RED...
- Publication number 20080213082
- Publication date Sep 4, 2008
- TOKYO ELECTRON LIMITED
- Yoshiyuki KATO
- H01 - BASIC ELECTRIC ELEMENTS