Yoshiyuki Kawafuchi

Person

  • Kikuchi-gun, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Coating film forming apparatus

    • Patent number 6,932,868
    • Issue date Aug 23, 2005
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Substrate coating unit and substrate coating method

    • Patent number 6,860,945
    • Issue date Mar 1, 2005
    • Tokyo Electron Limited
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Coating film forming apparatus

    • Patent number 6,811,613
    • Issue date Nov 2, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Grant

    Coating film forming system

    • Patent number 6,761,125
    • Issue date Jul 13, 2004
    • Tokyo Electron Limited
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    COATING FILM FORMING APPARATUS

    • Publication number 20050109274
    • Publication date May 26, 2005
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate coating unit and substrate coating method

    • Publication number 20050100681
    • Publication date May 12, 2005
    • TOKYO ELECTRON LIMITED
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming apparatus

    • Publication number 20030097983
    • Publication date May 29, 2003
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Coating film forming system

    • Publication number 20030056722
    • Publication date Mar 27, 2003
    • TOKYO ELECTRON LIMITED
    • Takahiro Kitano
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Substrate coating unit and substrate coating method

    • Publication number 20020134304
    • Publication date Sep 26, 2002
    • TOKYO ELECTRON LIMITED
    • Shinji Kobayashi
    • H01 - BASIC ELECTRIC ELEMENTS