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Yoshiyuki Nag-No
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Ibaraki, JP
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last 30 patents
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Patent Grant
Probe manufacturing method, probe, and scanning probe microscope
Patent number
7,388,199
Issue date
Jun 17, 2008
Hitachi Kenki Fine Tech Co., Ltd.
Takafumi Morimoto
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
Probe manufacturing method, probe, and scanning probe microsope
Publication number
20060284084
Publication date
Dec 21, 2006
Takafumi Morimoto
G01 - MEASURING TESTING