Yoshiyuki Nagai

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Tochigi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Patent number 7,145,925
- Issue date Dec 5, 2006
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus, exposure apparatus and method
- Patent number 7,085,302
- Issue date Aug 1, 2006
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser device and exposure apparatus using the same
- Patent number 7,031,364
- Issue date Apr 18, 2006
- Canon Kabushiki Kaisha
- Naoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Patent number 6,870,865
- Issue date Mar 22, 2005
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus
- Patent number 6,744,492
- Issue date Jun 1, 2004
- Canon Kabushiki Kaisha
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD
- Publication number 20090027647
- Publication date Jan 29, 2009
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas laser device and exposure apparatus using the same
- Publication number 20060093009
- Publication date May 4, 2006
- Canon Kabushiki Kaisha
- Naoto Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser oscillation apparatus, exposure apparatus, semiconductor devi...
- Publication number 20050030987
- Publication date Feb 10, 2005
- Canon Kabushiki Kaisha
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Laser apparatus, exposure apparatus and method
- Publication number 20030142715
- Publication date Jul 31, 2003
- Yoshiyuki Nagai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER DEVICE AND EXPOSURE APPARATUS USING THE SAME
- Publication number 20010046248
- Publication date Nov 29, 2001
- NAOTO SANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Exposure apparatus
- Publication number 20010015798
- Publication date Aug 23, 2001
- Kazuhiro Takahashi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY