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Yoshiyuki Ohta
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Kudamatsu, JP
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last 30 patents
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Patent Grant
Specimen surface processing apparatus and surface processing method
Patent number
7,354,525
Issue date
Apr 8, 2008
Hitachi High-Technologies Corporation
Masatoshi Oyama
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Specimen surface processing apparatus and surface processing method
Publication number
20060000804
Publication date
Jan 5, 2006
Masatoshi Oyama
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Specimen surface processing apparatus and surface processing method
Publication number
20040171273
Publication date
Sep 2, 2004
Masatoshi Oyama
H01 - BASIC ELECTRIC ELEMENTS