Yoshiyuki OOTA

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Kudamatsu-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for plasma processing
- Patent number 8,632,637
- Issue date Jan 21, 2014
- Hitachi High-Technologies Corporation
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 8,366,870
- Issue date Feb 5, 2013
- Hitachi High-Technologies Corporation
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for plasma processing
- Patent number 8,057,634
- Issue date Nov 15, 2011
- Hitachi High-Technologies Corporation
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
- Publication number 20140137059
- Publication date May 15, 2014
- Hitachi High-Technologies Corporation
- Ryoji NISHIO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
- Publication number 20130174105
- Publication date Jul 4, 2013
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR PLASMA PROCESSING
- Publication number 20110209828
- Publication date Sep 1, 2011
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Plasma Etching Method
- Publication number 20080076259
- Publication date Mar 27, 2008
- Yoshiyuki OOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for plasma processing
- Publication number 20070232085
- Publication date Oct 4, 2007
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for plasma processing
- Publication number 20070227669
- Publication date Oct 4, 2007
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and apparatus for plasma processing
- Publication number 20050230049
- Publication date Oct 20, 2005
- Ryoji Nishio
- G06 - COMPUTING CALCULATING COUNTING