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YOSHIYUKI SEKINE
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TOCHIGI-KEN, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Computer readable medium and exposure method
Patent number
8,411,253
Issue date
Apr 2, 2013
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Exposure apparatus and device manufacturing method
Patent number
8,027,025
Issue date
Sep 27, 2011
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, device manufacturing...
Patent number
7,511,888
Issue date
Mar 31, 2009
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Maskless exposure apparatus using optical modulator, and method for...
Patent number
7,430,036
Issue date
Sep 30, 2008
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interferometer and interferance measurement method
Patent number
7,106,455
Issue date
Sep 12, 2006
Canon Kabushiki Kaisha
Akiyoshi Suzuki
G01 - MEASURING TESTING
Information
Patent Grant
Optical unit having plural optical elements
Patent number
6,731,431
Issue date
May 4, 2004
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G02 - OPTICS
Information
Patent Grant
Projection optical system with diffractive optical element
Patent number
6,600,606
Issue date
Jul 29, 2003
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G02 - OPTICS
Information
Patent Grant
Illumination optical system and exposure apparatus having the same
Patent number
6,441,886
Issue date
Aug 27, 2002
Canon Kabushiki Kaisha
Akiyoshi Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Phase type computer hologram and optical instrument
Patent number
6,417,940
Issue date
Jul 9, 2002
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and device manufacturing method inclu...
Patent number
6,307,618
Issue date
Oct 23, 2001
Canon Kabushiki Kaisha
Akiyoshi Suzuki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection exposure apparatus and device manufacturing method
Patent number
6,266,192
Issue date
Jul 24, 2001
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G02 - OPTICS
Information
Patent Grant
Apparatus and method for exposing a pattern on a ball-like device m...
Patent number
6,097,472
Issue date
Aug 1, 2000
Canon Kabushiki Kaisha
Nobuyoshi Tanaka
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
COMPUTER READABLE MEDIUM AND EXPOSURE METHOD
Publication number
20100053580
Publication date
Mar 4, 2010
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20090002667
Publication date
Jan 1, 2009
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection optical system and exposure apparatus having the same
Publication number
20060176461
Publication date
Aug 10, 2006
Canon Kabushiki Kaisha
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Maskless exposure apparatus using optical modulator, and method for...
Publication number
20060066829
Publication date
Mar 30, 2006
Yoshiyuki Sekine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL UNIT HAVING PLURAL OPTICAL ELEMENTS
Publication number
20030043462
Publication date
Mar 6, 2003
Yoshiyuki Sekine
G02 - OPTICS
Information
Patent Application
Interferometer and interferance measurement method
Publication number
20030011783
Publication date
Jan 16, 2003
AKIYOSHI SUZUKI
G01 - MEASURING TESTING
Information
Patent Application
ILLUMINATION OPTICAL SYSTEM AND EXPOSURE APPARATUS HAVING THE SAME
Publication number
20020015142
Publication date
Feb 7, 2002
AKIYOSHI SUZUKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Projection optical system with diffractive optical element
Publication number
20020008911
Publication date
Jan 24, 2002
Yoshiyuki Sekine
G02 - OPTICS
Information
Patent Application
PROJECTION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD INCLU...
Publication number
20010048512
Publication date
Dec 6, 2001
AKIYOSHI SUZUKI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY