Yoshiyuki Tomita

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Sensor device and stage device
- Patent number 7,502,127
- Issue date Mar 10, 2009
- Sumitomo Heavy Industries, Ltd.
- Wei Gao
- G01 - MEASURING TESTING
Information Patent Grant
Stage device
- Patent number 7,257,902
- Issue date Aug 21, 2007
- Sumitomo Heavy Industries, Ltd.
- Wei Gao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate transfer device
- Patent number 7,239,939
- Issue date Jul 3, 2007
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for winding a single coil of a coil unit for a linear motor
- Patent number 7,082,674
- Issue date Aug 1, 2006
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airtight processing apparatus, airtight processing method, and elec...
- Patent number 6,965,115
- Issue date Nov 15, 2005
- Sumitomo Heavy Industries, Ltd.
- Naoki Yasumitsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device
- Patent number 6,925,355
- Issue date Aug 2, 2005
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-Y stage apparatus
- Patent number 6,817,104
- Issue date Nov 16, 2004
- Sumitomo Heavy Industries, Ltd.
- Makoto Kaneko
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Position control system and velocity control system for stage drivi...
- Patent number 6,668,202
- Issue date Dec 23, 2003
- Sumitomo Heavy Industries, Ltd.
- Kenichi Makino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Single coil of coil unit for linear motor, method and device for wi...
- Patent number 6,644,584
- Issue date Nov 11, 2003
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage position control method and stage position control apparatus...
- Patent number 6,584,367
- Issue date Jun 24, 2003
- Sumitomo Heavy Industries, Ltd.
- Kenichi Makino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Position controlling apparatus capable of reducing the effect of di...
- Patent number 6,564,110
- Issue date May 13, 2003
- Sumitomo Heavy Industries, Ltd.
- Kenichi Makino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Double side grinding apparatus and double side polishing apparatus
- Patent number 6,165,054
- Issue date Dec 26, 2000
- Super Silicon Crystal Research Institute Corp.
- Kohzo Abe
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for carrying out decoupling control of a T-die
- Patent number 5,056,030
- Issue date Oct 8, 1991
- Sumitomo Heavy Industries, Ltd.
- Yoshiyuki Tomita
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
REACTION FORCE TREATMENT MECHANISM, XY STAGE APPARATUS, INSPECTION...
- Publication number 20100270476
- Publication date Oct 28, 2010
- Sumitomo Heavy Industries, Ltd.
- Jun NISHIMAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Sensor device and stage device
- Publication number 20070041024
- Publication date Feb 22, 2007
- Sumitomo Heavy Industries, Ltd.
- Wei Gao
- G01 - MEASURING TESTING
Information Patent Application
Stage device
- Publication number 20070035267
- Publication date Feb 15, 2007
- Sumitomo Heavy Industries, Ltd.
- Wei Gao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate transfer device
- Publication number 20050187653
- Publication date Aug 25, 2005
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Airtight processing apparatus, airtight processing method, and elec...
- Publication number 20040263819
- Publication date Dec 30, 2004
- Sumitomo Heavy Industries, Ltd.
- Naoki Yasumitsu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Single coil of coil unit for linear motor, method and device for wi...
- Publication number 20040064935
- Publication date Apr 8, 2004
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-Y stage apparatus
- Publication number 20030213135
- Publication date Nov 20, 2003
- Makoto Kaneko
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SINGLE COIL OF COIL UNIT FOR LINEAR MOTOR, METHOD AND DEVICE FOR WI...
- Publication number 20030160126
- Publication date Aug 28, 2003
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Position control system and velocity control system for stage drivi...
- Publication number 20030097193
- Publication date May 22, 2003
- Sumitomo Heavy Industries, Ltd.
- Kenichi Makino
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate transfer device
- Publication number 20030068215
- Publication date Apr 10, 2003
- Sumitomo Heavy Industries, Ltd.
- Hidehiko Mori
- H01 - BASIC ELECTRIC ELEMENTS

Yoshiyuki Tomita

Person

Patents Grantslast 30 patents

Sensor device and stage device

Stage device

Substrate transfer device

Method for winding a single coil of a coil unit for a linear motor

Airtight processing apparatus, airtight processing method, and elec...

Substrate transfer device

X-Y stage apparatus

Position control system and velocity control system for stage drivi...

Single coil of coil unit for linear motor, method and device for wi...

Stage position control method and stage position control apparatus...

Position controlling apparatus capable of reducing the effect of di...

Double side grinding apparatus and double side polishing apparatus

Apparatus for carrying out decoupling control of a T-die

Patents Applicationslast 30 patents

REACTION FORCE TREATMENT MECHANISM, XY STAGE APPARATUS, INSPECTION...

Sensor device and stage device

Stage device

Substrate transfer device

Airtight processing apparatus, airtight processing method, and elec...

Single coil of coil unit for linear motor, method and device for wi...

X-Y stage apparatus

SINGLE COIL OF COIL UNIT FOR LINEAR MOTOR, METHOD AND DEVICE FOR WI...

Position control system and velocity control system for stage drivi...

Substrate transfer device